TACCOTA®
Efficient protection of graphite parts used in semiconductor production & processing
Efficient protection
Nippon Kornmeyer Carbon Group GmbH and Fraunhofer IISB present their innovative and patented tantalum carbide coating technology TACCOTA®.
The high temperature and corrosion resistant coating can be applied to graphite substrates and used in semiconductor material production and processing. It secures graphite parts from decomposition and corrosion in typical high temperature and reactive gas processes like SiC and nitride PVT crystal growth and epitaxy, ion implantation, and plasma processing. The benefit is an increased life time and improved cost of ownership.
TACCOTA® - improves your semiconductor material production and processing.
Find out more about all the benefits.
Flexible coating properties
The process technology allows the adjustment of the desired coating properties such as thickness and composition (i.e. blend with other high temperature ceramic materials).
Advanced coating
High temperature resistance (up to 3000°C)
Resistance against corrosive gases and fluids, molten metals and salts
Excellent wear resistance and good adhesion to the graphite substrate
Thickness between 20 -300 μm adjustable
Surface roughness Raof about 1-2 μm independent of coating thickness
Adjustable from porous to dense layers with different permeabilities
Variable coating composition (mixtures with other UHTC materials)
Flexiblefor part size and geometry
Partial and all-around coating possible
Part refurbishment
Resourceefficient and environmentally friendly
Use of only conflict-free materials
Industry ready
Dirk Mützenich
Global Product Management & Sales
Phone +49 16096073490
dirk.muetzenich@carbongroup.de