CVD

Silicon carbide coating | High-purity SiC protection for graphite

High-purity SiC protection through chemical vapor deposition

Classic CVD deposition of silicon carbide yields smooth, dense, and chemically stable surfaces with excellent temperature resistance. Perfect for applications with the highest purity requirements.

Advantages of CVD silicon carbide coating

Maximum purity for sensitive processes
High oxidation and corrosion resistance
Very good adhesion to graphite

Typical applications for CVD silicon carbide coatings

wafer carrier
Semiconductor and PV production
Chemical process plants

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