Patented silicon carbide coating for graphite. Protects against oxidation, corrosion, and wear. Longer service life, greater process reliability.
Patented SiC coating for longer service life of graphite
With SICCOTA®, we offer a dense, high-purity silicon carbide coating that reliably protects graphite components from oxidation, corrosion, and abrasive wear. Ideal for demanding high-temperature and reactive gas processes.
Advantages of silicon carbide coating
Increased service life and process reliability
Very good chemical resistance
Increased efficiency and lower maintenance costs
Typical applications for SICCOTA
Semiconductor manufacturing
Vacuum and reactive gas processes
High-temperature furnaces
SICCOTA Whitepaper
NipponKornmeyer and the Fraunhofer IISB present their second innovative and patented coating technology, SICCOTA®. The corrosion- and oxidation-resistant SiC coating can be applied to isostatically pressed graphite substrates and used in semiconductor production and processing along the value chain.